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| |style="background:silver; color:black"| | | |style="background:silver; color:black"|Samples |
| |style="background:WhiteSmoke; color:black"|<30pm RMS
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| |style="background:WhiteSmoke; color:black"|<30pm RMS
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| |-
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| |style="background:silver; color:black"|
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| |style="background:WhiteSmoke; color:black"|<0.15nm RMS
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| |style="background:WhiteSmoke; color:black"|<0.15nm RMS
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| |-
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| |style="background:silver; color:black"|
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| |style="background:WhiteSmoke; color:black"|35pm RMS
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| |style="background:WhiteSmoke; color:black"|35pm RMS
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| |-
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| |style="background:silver; color:black"|
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| |style="background:WhiteSmoke; color:black"|<0.5%
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| |style="background:WhiteSmoke; color:black"|<0.5%
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| |-
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| |style="background:silver; color:black"|
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| |style="background:WhiteSmoke; color:black"|<0.15nm RMS
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| |style="background:WhiteSmoke; color:black"|<0.15nm RMS
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| |style="background:silver; color:black"|
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| |style="background:WhiteSmoke; color:black"|~1 for our standard probe. Can be improved to about 10 with the right probe
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| |style="background:WhiteSmoke; color:black"|~1 for our standard probe. Can be improved to about 10 with the right probe
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| !style="background:silver; color:black" align="left"|Hardware settings
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| |style="background:WhiteSmoke; color:black"|Standard probe: <12 nm
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| |style="background:WhiteSmoke; color:black"|Standard probe: <12 nm
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| |style="background:silver; color:black"|
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| |style="background:WhiteSmoke; color:black"|[http://www.brukerafmprobes.com/p-3726-scanasyst-air.aspx ScanAsyst in Air]
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| |style="background:WhiteSmoke; color:black"|[http://www.brukerafmprobes.com/p-3726-scanasyst-air.aspx ScanAsyst in Air]
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| |style="background:silver; color:black"|
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| |style="background:WhiteSmoke; color:black"|[http://www.nanoandmore.com/AFM-Probe-Tap300Al-G.html Tap300Al-G]
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| |style="background:WhiteSmoke; color:black"|[http://www.nanoandmore.com/AFM-Probe-Tap300Al-G.html Tap300Al-G]
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| |style="background:silver; color:black"|
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| |style="background:WhiteSmoke; color:black"|[http://www.nanoandmore.com/AFM-Probe-SSS-NCHR.html SSS-NCHR]
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| |style="background:silver; color:black"|
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| |style="background:WhiteSmoke; color:black"|[http://www.nanoandmore.com/AFM-Probe-AR5-NCHR.html AR5-NCHR]
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| |style="background:WhiteSmoke; color:black"|[http://www.nanoandmore.com/AFM-Probe-AR5-NCHR.html AR5-NCHR]
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| |style="background:silver; color:black"|
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| |style="background:WhiteSmoke; color:black"| | | |style="background:WhiteSmoke; color:black"| |
| *[http://www.brukerafmprobes.com Bruker] | | *QC grid: VGRP-15M 10µm pitch and depth reference 178nm |
| *[http://www.nanoandmore.com/home.php www.nanoandmore.com] | | *PF KPFM-SMPL Kelvin probe Sample: Al + Au on Si |
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| | '''Calibration samples for getting quantitative modulus measurements:''' |
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| | #PDMS-soft-1-12M: PDMS gel 2.5MPa |
| | #PDMS-soft-2-12M: PDMS gel 3.5MPa |
| | #PSFilm-12M: Polystyrene filem |
| | #FSilica-12M: Fused Silica |
| | #Sapphire-12M: Sapphire |
| | #RS-12M: Ti roughness sample |
| | #HOPG-12M: Highly Orientated Pyrolytic Graphite |
| | #PS-LDPE: Harmonix training |
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| | *HOPG: Highly Oriented Pyrolytic Graphite |
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| |style="background:WhiteSmoke; color:black"| | | |style="background:WhiteSmoke; color:black"| |
| *[http://www.brukerafmprobes.com Bruker] | | *QC grid: VGRP-15M 10µm pitch and depth reference 178nm |
| *[http://www.nanoandmore.com/home.php www.nanoandmore.com]
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| !style="background:silver; color:black" align="left"|Substrates
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| |style="background:WhiteSmoke; color:black"|Up to 210mm in diameter and up to 15mm thick"
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| |style="background:WhiteSmoke; color:black"|Up to 210mm in diameter and up to 15mm thick"
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| |-
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| !style="background:silver; color:black" align="left"|
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| |style="background:WhiteSmoke; color:black"|
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| *180mmx150mm inspection area
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| *2µm repeatability, unidirectional
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| *3µm repeatability, bidirectional
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| |style="background:WhiteSmoke; color:black"|
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| *180mmx150mm inspection area
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| *2µm repeatability, unidirectional
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| *3µm repeatability, bidirectional
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| |-
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| |style="background:silver; color:black"|
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| |style="background:WhiteSmoke; color:black"|In principle all materials
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| |style="background:WhiteSmoke; color:black"|In principle all materials
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| |- | | |- |
| |} | | |} |
