Specific Process Knowledge/Characterization/AFM: Atomic Force Microscopy/AFM Icon Acceptance: Difference between revisions

← Older edit Newer edit →

VisualWikitext

@@ Line 11: / Line 11: @@
 |-
 !style="background:silver; color:black;" align="left"|Position
-|style="background:LightGrey; color:black"|
 |style="background:WhiteSmoke; color:black"|
 Inside the cleanroom
@@ Line 18: / Line 17: @@
 |-
 !style="background:silver; color:black;" align="left"|Purpose
-|style="background:LightGrey; color:black"|Topografic measurement in the nanometer and and sub-micrometer regime and electrical and mechanical measurements
 |style="background:WhiteSmoke; color:black"|
 *Surface roughness measurement
@@ Line 34: / Line 32: @@
 |-
 !style="background:silver; color:black" align="left"|Performance
-|style="background:LightGrey; color:black"|Scan range xy
 |style="background:WhiteSmoke; color:black"|Up to 90 µm square
 |style="background:WhiteSmoke; color:black"|Up to 90 µm square
 |-
 |style="background:silver; color:black"|
-|style="background:LightGrey; color:black"|Scan range z
 |style="background:WhiteSmoke; color:black"| Up to 13µm
 |style="background:WhiteSmoke; color:black"| Up to 13µm
 |-
 |style="background:silver; color:black"|
-|style="background:LightGrey; color:black"|Vertical noise floor
 |style="background:WhiteSmoke; color:black"|<30pm RMS
 |style="background:WhiteSmoke; color:black"|<30pm RMS
 |-
 |style="background:silver; color:black"|
-|style="background:LightGrey; color:black"|X-Y position noise (closed loop)
 |style="background:WhiteSmoke; color:black"|<0.15nm RMS
 |style="background:WhiteSmoke; color:black"|<0.15nm RMS
 |-
 |style="background:silver; color:black"|
-|style="background:LightGrey; color:black"|Z sensor noise level(closed loop)
 |style="background:WhiteSmoke; color:black"|35pm RMS
 |style="background:WhiteSmoke; color:black"|35pm RMS
 |-
 |style="background:silver; color:black"|
-|style="background:LightGrey; color:black"|Integral nonlinearity(X-Y-Z)
 |style="background:WhiteSmoke; color:black"|<0.5%
 |style="background:WhiteSmoke; color:black"|<0.5%
 |-
 |style="background:silver; color:black"|
-|style="background:LightGrey; color:black"|X-Y position noise (closed loop)
 |style="background:WhiteSmoke; color:black"|<0.15nm RMS
 |style="background:WhiteSmoke; color:black"|<0.15nm RMS
 |-
 |style="background:silver; color:black"|
-|style="background:LightGrey; color:black"|Max. scan depth as a function of trench width W
 |style="background:WhiteSmoke; color:black"|~1 for our standard probe. Can be improved to about 10 with the right probe
 |style="background:WhiteSmoke; color:black"|~1 for our standard probe. Can be improved to about 10 with the right probe
 |-
 !style="background:silver; color:black" align="left"|Hardware settings
-|style="background:LightGrey; color:black"|Tip radius of curvature
 |style="background:WhiteSmoke; color:black"|Standard probe: <12 nm
 |style="background:WhiteSmoke; color:black"|Standard probe: <12 nm
 |-
 |style="background:silver; color:black"|
-|style="background:LightGrey; color:black"|Standard ScanAsyst mode Cantilever/tip
 |style="background:WhiteSmoke; color:black"|[http://www.brukerafmprobes.com/p-3726-scanasyst-air.aspx ScanAsyst in Air]
 |style="background:WhiteSmoke; color:black"|[http://www.brukerafmprobes.com/p-3726-scanasyst-air.aspx ScanAsyst in Air]
 |-
 |style="background:silver; color:black"|
-|style="background:LightGrey; color:black"|Standard Tapping mode Cantilevers/tips
 |style="background:WhiteSmoke; color:black"|[http://www.nanoandmore.com/AFM-Probe-Tap300Al-G.html Tap300Al-G]
 |style="background:WhiteSmoke; color:black"|[http://www.nanoandmore.com/AFM-Probe-Tap300Al-G.html Tap300Al-G]
 |-
 |style="background:silver; color:black"|
-|style="background:LightGrey; color:black"|Super Sharp Si Cantilever/tip
 |style="background:WhiteSmoke; color:black"|[http://www.nanoandmore.com/AFM-Probe-SSS-NCHR.html SSS-NCHR]
 |-
 |style="background:silver; color:black"|
-|style="background:LightGrey; color:black"|High Aspect Ratio Cantilever/tip
 |style="background:WhiteSmoke; color:black"|[http://www.nanoandmore.com/AFM-Probe-AR5-NCHR.html AR5-NCHR]
 |style="background:WhiteSmoke; color:black"|[http://www.nanoandmore.com/AFM-Probe-AR5-NCHR.html AR5-NCHR]
 |-
 |style="background:silver; color:black"|
-|style="background:LightGrey; color:black"|Cantilevers/tips vendor
 |style="background:WhiteSmoke; color:black"|
 *[http://www.brukerafmprobes.com Bruker]
@@ Line 108: / Line 92: @@
 |-
 !style="background:silver; color:black" align="left"|Substrates
-|style="background:LightGrey; color:black"|Substrate size
 |style="background:WhiteSmoke; color:black"|Up to 210mm in diameter and up to 15mm thick"
 |style="background:WhiteSmoke; color:black"|Up to 210mm in diameter and up to 15mm thick"
 |-
 !style="background:silver; color:black" align="left"|
-|style="background:LightGrey; color:black"|Motorized stage (X-Y axis)
 |style="background:WhiteSmoke; color:black"|
 *180mmx150mm inspection area
@@ Line 124: / Line 106: @@
 |-
 |style="background:silver; color:black"|
-| style="background:LightGrey; color:black"|Substrate material allowed
 |style="background:WhiteSmoke; color:black"|In principle all materials
 |style="background:WhiteSmoke; color:black"|In principle all materials