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Specific Process Knowledge/Characterization/AFM: Atomic Force Microscopy/AFM Icon Acceptance: Difference between revisions

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DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, Bureaucrats, Administrators
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=AFM Icon 1 accessories and acceptance test=
=AFM Icon 1 accessories and acceptance test=
==Accessories following the system==
==Accessories following the system==
{| border="2" cellspacing="0" cellpadding="2"
!colspan="2" border="none" style="background:silver; color:black;" align="center"|Equipment
|style="background:WhiteSmoke; color:black"|<b>AFM Icon</b>
|style="background:WhiteSmoke; color:black"|<b>AFM Icon 2</b>
|-
!style="background:silver; color:black;" align="left"|Position
|style="background:LightGrey; color:black"|
|style="background:WhiteSmoke; color:black"|
Inside the cleanroom
|style="background:WhiteSmoke; color:black"|
In the basement of building 346
|-
!style="background:silver; color:black;" align="left"|Purpose
|style="background:LightGrey; color:black"|Topografic measurement in the nanometer and and sub-micrometer regime and electrical and mechanical measurements
|style="background:WhiteSmoke; color:black"|
*Surface roughness measurement
*Step/structure hight measurement
*Surface image
*Surface potential
*Modulus
*Adhesion
*Deformation
|style="background:WhiteSmoke; color:black"|
*Surface roughness measurement
*Step/structure hight measurement
*Surface image
|-
!style="background:silver; color:black" align="left"|Performance
|style="background:LightGrey; color:black"|Scan range xy
|style="background:WhiteSmoke; color:black"|Up to 90 µm square
|style="background:WhiteSmoke; color:black"|Up to 90 µm square
|-
|style="background:silver; color:black"|
|style="background:LightGrey; color:black"|Scan range z
|style="background:WhiteSmoke; color:black"| Up to 13µm
|style="background:WhiteSmoke; color:black"| Up to 13µm
|-
|style="background:silver; color:black"|
|style="background:LightGrey; color:black"|Vertical noise floor
|style="background:WhiteSmoke; color:black"|<30pm RMS
|style="background:WhiteSmoke; color:black"|<30pm RMS
|-
|style="background:silver; color:black"|
|style="background:LightGrey; color:black"|X-Y position noise (closed loop)
|style="background:WhiteSmoke; color:black"|<0.15nm RMS
|style="background:WhiteSmoke; color:black"|<0.15nm RMS
|-
|style="background:silver; color:black"|
|style="background:LightGrey; color:black"|Z sensor noise level(closed loop)
|style="background:WhiteSmoke; color:black"|35pm RMS
|style="background:WhiteSmoke; color:black"|35pm RMS
|-
|style="background:silver; color:black"|
|style="background:LightGrey; color:black"|Integral nonlinearity(X-Y-Z)
|style="background:WhiteSmoke; color:black"|<0.5%
|style="background:WhiteSmoke; color:black"|<0.5%
|-
|style="background:silver; color:black"|
|style="background:LightGrey; color:black"|X-Y position noise (closed loop)
|style="background:WhiteSmoke; color:black"|<0.15nm RMS
|style="background:WhiteSmoke; color:black"|<0.15nm RMS
|-
|style="background:silver; color:black"|
|style="background:LightGrey; color:black"|Max. scan depth as a function of trench width W
|style="background:WhiteSmoke; color:black"|~1 for our standard probe. Can be improved to about 10 with the right probe
|style="background:WhiteSmoke; color:black"|~1 for our standard probe. Can be improved to about 10 with the right probe
|-
!style="background:silver; color:black" align="left"|Hardware settings
|style="background:LightGrey; color:black"|Tip radius of curvature
|style="background:WhiteSmoke; color:black"|Standard probe: <12 nm
|style="background:WhiteSmoke; color:black"|Standard probe: <12 nm
|-
|style="background:silver; color:black"|
|style="background:LightGrey; color:black"|Standard ScanAsyst mode Cantilever/tip
|style="background:WhiteSmoke; color:black"|[http://www.brukerafmprobes.com/p-3726-scanasyst-air.aspx ScanAsyst in Air]
|style="background:WhiteSmoke; color:black"|[http://www.brukerafmprobes.com/p-3726-scanasyst-air.aspx ScanAsyst in Air]
|-
|style="background:silver; color:black"|
|style="background:LightGrey; color:black"|Standard Tapping mode Cantilevers/tips
|style="background:WhiteSmoke; color:black"|[http://www.nanoandmore.com/AFM-Probe-Tap300Al-G.html Tap300Al-G]
|style="background:WhiteSmoke; color:black"|[http://www.nanoandmore.com/AFM-Probe-Tap300Al-G.html Tap300Al-G]
|-
|style="background:silver; color:black"|
|style="background:LightGrey; color:black"|Super Sharp Si Cantilever/tip
|style="background:WhiteSmoke; color:black"|[http://www.nanoandmore.com/AFM-Probe-SSS-NCHR.html SSS-NCHR]
|-
|style="background:silver; color:black"|
|style="background:LightGrey; color:black"|High Aspect Ratio Cantilever/tip
|style="background:WhiteSmoke; color:black"|[http://www.nanoandmore.com/AFM-Probe-AR5-NCHR.html AR5-NCHR]
|style="background:WhiteSmoke; color:black"|[http://www.nanoandmore.com/AFM-Probe-AR5-NCHR.html AR5-NCHR]
|-
|style="background:silver; color:black"|
|style="background:LightGrey; color:black"|Cantilevers/tips vendor
|style="background:WhiteSmoke; color:black"|
*[http://www.brukerafmprobes.com Bruker]
*[http://www.nanoandmore.com/home.php www.nanoandmore.com]
|style="background:WhiteSmoke; color:black"|
*[http://www.brukerafmprobes.com Bruker]
*[http://www.nanoandmore.com/home.php www.nanoandmore.com]
|-
|-
!style="background:silver; color:black" align="left"|Substrates
|style="background:LightGrey; color:black"|Substrate size
|style="background:WhiteSmoke; color:black"|Up to 210mm in diameter and up to 15mm thick"
|style="background:WhiteSmoke; color:black"|Up to 210mm in diameter and up to 15mm thick"
|-
!style="background:silver; color:black" align="left"|
|style="background:LightGrey; color:black"|Motorized stage (X-Y axis)
|style="background:WhiteSmoke; color:black"|
*180mmx150mm inspection area
*2µm repeatability, unidirectional
*3µm repeatability, bidirectional
|style="background:WhiteSmoke; color:black"|
*180mmx150mm inspection area
*2µm repeatability, unidirectional
*3µm repeatability, bidirectional
|-
|style="background:silver; color:black"|
| style="background:LightGrey; color:black"|Substrate material allowed
|style="background:WhiteSmoke; color:black"|In principle all materials
|style="background:WhiteSmoke; color:black"|In principle all materials
|-
|}
<br clear="all" />


===Extra chuck===
===Extra chuck===
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Potential image: Potential difference between grapheme and non-graphene is visible <br>  
Potential image: Potential difference between grapheme and non-graphene is visible <br>  
Phase: Phase imaging maps the phase lag between the periodic signal driving the cantilever and the oscillations of the cantilever. Changes in phase lag often indicate changes in the properties of the sample surface. Here the structuring in the graphene is very clear
Phase: Phase imaging maps the phase lag between the periodic signal driving the cantilever and the oscillations of the cantilever. Changes in phase lag often indicate changes in the properties of the sample surface. Here the structuring in the graphene is very clear


=AFM Icon 2 accessories and acceptance test=
=AFM Icon 2 accessories and acceptance test=
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