Specific Process Knowledge/Etch/DRIE-Pegasus/TrenchCharacterisation: Difference between revisions
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: <math> \tfrac{\mathrm{ED} \times \mathrm{PS}}{\mathrm{ET}}</math> | : <math> \tfrac{\mathrm{ED} \times \mathrm{PS}}{\mathrm{ET}}</math> | ||
: or | : or | ||