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Specific Process Knowledge/Thin film deposition/thermalevaporator: Difference between revisions

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*1 Å/s (Al), 5 Å/s (Ag)
*1 Å/s (Al), 5 Å/s (Ag)
*In general, 0.5-10 Å/s is possible but we need to develop a process for other rates.
*In general, 0.5-10 Å/s is possible
*We need to develop a new process each rate
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!style="background:silver; color:black" align="left" valign="top" rowspan="2"|Process parameter range
!style="background:silver; color:black" align="left" valign="top" rowspan="2"|Process parameter range
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