Specific Process Knowledge/Etch/DRIE-Pegasus/TrenchCharacterisation: Difference between revisions
| Line 69: | Line 69: | ||
: or | : or | ||
: <math> \ | : <math> \acos(\tfrac{ | ||
\alpha}{\sqrt{\mathrm{ED}^2+\alpha^2}}) </math> with <math> \alpha = \tfrac{\mathrm{TW}-\mathrm{BW}}{2} </math> | \alpha}{\sqrt{\mathrm{ED}^2+\alpha^2}}) </math> with <math> \alpha = \tfrac{\mathrm{TW}-\mathrm{BW}}{2} </math> | ||