Specific Process Knowledge/Etch/DRIE-Pegasus: Difference between revisions
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== Process information == | == Process information == | ||
===SPTS process notation=== | |||
Describing a process recipe on the Pegasus may sometimes be difficult because of the great flexibility of the instrument. A compact and precise notation is therefore required for the recipes. Click [[Specific_Process_Knowledge/Etch/DRIE-Pegasus/Notation|'''HERE''']] to find a short description of the official SPTS notation. | Describing a process recipe on the Pegasus may sometimes be difficult because of the great flexibility of the instrument. A compact and precise notation is therefore required for the recipes. Click [[Specific_Process_Knowledge/Etch/DRIE-Pegasus/Notation|'''HERE''']] to find a short description of the official SPTS notation. | ||
===Hardware changes=== | |||
A few hardware modifications have been made on the Pegasus since it was installed in 2010. The changes are listed in the table below under hardware options. | A few hardware modifications have been made on the Pegasus since it was installed in 2010. The changes are listed in the table below under hardware options. | ||