Specific Process Knowledge/Etch/DRIE-Pegasus: Difference between revisions
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== Process information == | |||
'''SPTS process notation''' | |||
Describing a process recipe on the Pegasus may sometimes be difficult because of the great flexibility of the instrument. A compact and precise notation is therefore required for the recipes. Click [[Specific_Process_Knowledge/Etch/DRIE-Pegasus/Notation|'''HERE''']] to find a short description of the official SPTS notation. | |||
'''Hardware changes''' | |||
A few hardware modifications have been made on the Pegasus since it was installed in 2010. The changes are listed in the table below under hardware options. | |||
{| border="2" cellspacing="1" cellpadding="1" align="center" | |||
! style="background:silver; color:black" | | |||
! style="background:silver; color:black" | [[Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-1| DRIE-Pegasus 1]] | |||
! style="background:silver; color:black" | [[Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-2| DRIE-Pegasus 2]] | |||
! style="background:silver; color:black" | [[Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-3| DRIE-Pegasus 3]] | |||
! style="background:silver; color:black" | [[Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-4| DRIE-Pegasus 4]] | |||
|- valign="top" | |||
! style="background:Whitesmoke; color:black" | Purpose (current or intended) | |||
| style="background:WhiteSmoke; color:black" | 4" silicon etch workhorse | |||
| style="background:WhiteSmoke; color:black"| Research tool with very limited number of users | |||
| style="background:WhiteSmoke; color:black"| 6" silicon etch workhorse | |||
| style="background:WhiteSmoke; color:black"| 6" dielectric etcher | |||
|- valign="top" | |||
! style="background:lightgrey; color:black" | Manufactured | |||
| style="background:lightgrey; color:black" | 2010 | |||
| style="background:lightgrey; color:black" | 2010 | |||
| style="background:lightgrey; color:black" | ? | |||
| style="background:lightgrey; color:black" | ? | |||
|- valign="top" | |||
! style="background:Whitesmoke; color:black" | Serial | |||
! style="background:WhiteSmoke; color:black" | MP0636 | |||
| style="background:WhiteSmoke; color:black"| MP0641 | |||
| style="background:WhiteSmoke; color:black"| ? | |||
| style="background:WhiteSmoke; color:black"| ? | |||
|- valign="top" | |||
! style="background:lightgrey; color:black" | Electrode size | |||
| style="background:lightgrey; color:black" | 4" | |||
| style="background:lightgrey; color:black" | 6" | |||
| style="background:lightgrey; color:black" | 6" | |||
| style="background:lightgrey; color:black" | 6" | |||
|- valign="top" | |||
! style="background:Whitesmoke; color:black" | Hardware options | |||
| style="background:WhiteSmoke; color:black" | | |||
* [[Specific Process Knowledge/Etch/DRIE-Pegasus/showerheadchange|High flow plenum]] | |||
* [[Specific Process Knowledge/Etch/DRIE-Pegasus/picoscope|Picoscope oscilloscope]] | |||
*[[Specific Process Knowledge/Etch/DRIE-Pegasus/Claritas|Claritas optical endpoint system]] | |||
| style="background:WhiteSmoke; color:black"| | |||
* [[Specific Process Knowledge/Etch/DRIE-Pegasus/showerheadchange|High flow plenum]] | |||
| style="background:WhiteSmoke; color:black"| ? | |||
| style="background:WhiteSmoke; color:black"| ? | |||
|- | |||
|} | |||
== General Pegasus information == | == General Pegasus information == | ||