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DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
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== Process information ==
== Process information ==


'''SPTS process notation'''
Describing a process recipe on the Pegasus may sometimes be difficult because of the great flexibility of the instrument. A compact and precise notation is therefore required for the recipes. Click [[Specific_Process_Knowledge/Etch/DRIE-Pegasus/Notation|here]] to find a short description of the official SPTS notation.


'''[[Specific Process Knowledge/Etch/DRIE-Pegasus/StandardRecipes|Standard recipes]]'''
'''[[Specific Process Knowledge/Etch/DRIE-Pegasus/StandardRecipes|Standard recipes]]'''
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