Specific Process Knowledge/Etch/DRIE-Pegasus: Difference between revisions
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| SF<sub>6</sub> | | width="50"| SF<sub>6</sub> | ||
| O<sub>2</sub> | | width="50"| O<sub>2</sub> | ||
| C<sub>4</sub>F<sub>8</sub> | | width="50"| C<sub>4</sub>F<sub>8</sub> | ||
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| Ar | | width="50"| Ar | ||
| He | | width="50"| He | ||
| CF<sub>4</sub> | | width="50"| CF<sub>4</sub> | ||
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| H<sub>2</sub> | | width="50"| H<sub>2</sub> | ||
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