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Specific Process Knowledge/Etch/DRIE-Pegasus: Difference between revisions

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Jmli (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
4,579 edits
Jmli (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
4,579 edits
Line 170: Line 170:
* Ar: 0 to 283 sccm
* Ar: 0 to 283 sccm
|style="background:lightgrey; color:black"|
|style="background:lightgrey; color:black"|
* SF<sub>6</sub>  
SF<sub>6</sub>  
* O<sub>2</sub>  
O<sub>2</sub>  
* C<sub>4</sub>F<sub>8</sub>
C<sub>4</sub>F<sub>8</sub>
* Ar
Ar
|style="background:lightgrey; color:black"|
|style="background:lightgrey; color:black"|
{|
{|
| * SF<sub>6</sub>
| SF<sub>6</sub>
| * O<sub>2</sub>
| O<sub>2</sub>
| * C<sub>4</sub>F<sub>8</sub>
| C<sub>4</sub>F<sub>8</sub>
|-  
|-  
| * Ar
| Ar
| * He
| He
| * CF<sub>4</sub>
| CF<sub>4</sub>
|-
|-
| * H<sub>2</sub>
| H<sub>2</sub>
|
|
|
|
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