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Specific Process Knowledge/Etch/DRIE-Pegasus: Difference between revisions

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DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
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Jmli (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
4,579 edits
Line 58: Line 58:
! style="background:silver; color:black" | [[Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-4| DRIE-Pegasus 4]]
! style="background:silver; color:black" | [[Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-4| DRIE-Pegasus 4]]
|- valign="top"
|- valign="top"
! style="background:Whitesmoke; color:black" |Purpose
! style="background:Whitesmoke; color:black" | Serial
! style="background:WhiteSmoke; color:black" | 1
! style="background:WhiteSmoke; color:black" | MP0636
| style="background:WhiteSmoke; color:black"| 2
| style="background:WhiteSmoke; color:black"| MP0641
| style="background:WhiteSmoke; color:black"| 3
| style="background:WhiteSmoke; color:black"| ?
| style="background:WhiteSmoke; color:black"| 4
| style="background:WhiteSmoke; color:black"| ?
 
|- valign="top"
|- valign="top"
! style="background:lightgrey; color:black" | Alternative/backup uses
! style="background:lightgrey; color:black" | Manufactured
| style="background:lightgrey; color:black" | Backup silicon etcher
| style="background:lightgrey; color:black" | 2010
| style="background:lightgrey; color:black" |  
| style="background:lightgrey; color:black" | 2010
| style="background:lightgrey; color:black" | Barc etch
| style="background:lightgrey; color:black" | ?
| style="background:lightgrey; color:black" | Silicon etcher
| style="background:lightgrey; color:black" | ?
|-
|-
|}
|}
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