Specific Process Knowledge/Etch/DRIE-Pegasus: Difference between revisions

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-Name: PRO ICP - DRIE Pegasus (Deep Reactive Ion Etcher) <br>
-Vendor: STS (now SPTS) <br>
-'''The Bosch process'''
+=== The Bosch process ===
-The DRIE Pegasus is a state-of-art silicon dry etcher that offers outstanding performance in terms of etch rate, uniformity etc. It uses the so-called Bosch process to achieve excellent control of the etched features. Click [[Specific_Process_Knowledge/Etch/DRIE-Pegasus/System-description|'''HERE''']] for more fundamental information of the system.
+The DRIE Pegasus tools are state-of-art silicon dry etchers that offer outstanding performance in terms of etch rate, uniformity etc. It uses the so-called Bosch process to achieve excellent control of the etched features. Click [[Specific_Process_Knowledge/Etch/DRIE-Pegasus/System-description|'''HERE''']] for more fundamental information of the system.
 '''The user manual(s), quality control procedure(s) and results, user APV(s), technical information and contact information can be found in LabManager:'''