Specific Process Knowledge/Etch/DRIE-Pegasus: Difference between revisions
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Then, in 2017 we got our hands on a twin Pegasus system with cassette to cassette vacuum robot at a very reasonable price from a commerciel fab. The twin Pegasus system (will be called Pegasus 3 and 4) will be installed at the old cluster 2 location in cleanroom C1 from August 2018 onwards. | Then, in 2017 we got our hands on a twin Pegasus system with cassette to cassette vacuum robot at a very reasonable price from a commerciel fab. The twin Pegasus system (will be called Pegasus 3 and 4) will be installed at the old cluster 2 location in cleanroom C1 from August 2018 onwards. | ||
{| | |||
| [[Image:DRIE-Pegasus.jpg |frame|left|x300px|The DRIE-Pegasus 1 load lock and cassette loader in the Danchip cleanroom A-1]] | |||
| [[Image:Pegasus 2 operator.jpg |frame|x300px|The-Pegasus 2 operator station and load lock in the Danchip cleanroom A-1]] | |||
|- | |||
| DRIE-Pegasus 1 | |||
| DRIE-Pegasus 2 | |||
|- | |||
| Serial MP0636 | |||
| Serial MP0641 | |||
|} | |||
Name: PRO ICP - DRIE Pegasus (Deep Reactive Ion Etcher) <br> | Name: PRO ICP - DRIE Pegasus (Deep Reactive Ion Etcher) <br> | ||