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Specific Process Knowledge/Lithography/UVExposure: Difference between revisions

Taran (talk | contribs)
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Projection
Projection
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| style="background:LightGrey; color:black"|Exposure light/filters
| style="background:LightGrey; color:black"|Exposure light
|style="background:WhiteSmoke; color:black" align="center" colspan="2"|
|style="background:WhiteSmoke; color:black" align="center" colspan="2"|
365nm (LED), FWHM=8nm
365nm (LED), FWHM=8nm