Specific Process Knowledge/Etch/Etching of Silicon Oxide: Difference between revisions
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== Comparing silicon oxide etch methods at | == Comparing silicon oxide etch methods at DTU Nanolab == | ||
There are a broad varity of silicon oxide etch methods at | There are a broad varity of silicon oxide etch methods at DTU Nanolab. The methodes are compared here to make it easier for you to compare and choose the one that suits your needs. | ||
*[[Specific Process Knowledge/Etch/Wet Silicon Oxide Etch (BHF)|Wet Silicon Oxide Etch]] | *[[Specific Process Knowledge/Etch/Wet Silicon Oxide Etch (BHF)|Wet Silicon Oxide Etch]] | ||