Specific Process Knowledge/Lithography/Coaters/Spin Coater: RCD8 processing: Difference between revisions
Appearance
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**0.7 ml/s @ 3.0 bar | **0.7 ml/s @ 3.0 bar | ||
*'''KMPR 1025:''' | *'''KMPR 1025:''' | ||
** | **0.4 ml/s @ 0.5 bar | ||
** | **0.7 ml/s @ 1.0 bar | ||
*'''SU-8 2010:''' | *'''SU-8 2010:''' | ||
**1.1 ml/s @ 0.1 bar*'''AZ 5214E:''' | **1.1 ml/s @ 0.1 bar*'''AZ 5214E:''' | ||