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Specific Process Knowledge/Lithography/UVExposure: Difference between revisions

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Lgpe (talk | contribs)
DCH-Employees-701, NLAB-Employees-701
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Lgpe (talk | contribs)
DCH-Employees-701, NLAB-Employees-701
353 edits
Line 194: Line 194:
| style="background:LightGrey; color:black"|Allowed materials
| style="background:LightGrey; color:black"|Allowed materials
|style="background:WhiteSmoke; color:black" align="center" colspan="2"|
|style="background:WhiteSmoke; color:black" align="center" colspan="2"|
All cleanroom materials except copper and steel
All cleanroom materials


Dedicated chuck for III-V materials
Dedicated chuck for III-V materials
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