Specific Process Knowledge/Thin film deposition: Difference between revisions
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*[[/Black Magic PECVD|Black Magic PECVD]] - ''Black Magic PECVD (Carbon)'' | *[[/Black Magic PECVD|Black Magic PECVD]] - ''Black Magic PECVD (Carbon)'' | ||
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*[[/ALD Picosun R200|ALD Picosun R200]] - Atomic Layer Deposition | *[[/ALD Picosun R200|ALD Picosun R200]] - Thermal atomic layer deposition | ||
*[[/ALD2 (PEALD)|ALD2 (PEALD)]] - | *[[/ALD Picosun R200|ALD1]] - Atomic Layer Deposition (thermal) | ||
*[[/ALD2 (PEALD)|ALD2 (PEALD)]] - Atomic Layer Deposition (thermal and plasma enhanced) | |||
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See the [[Specific Process Knowledge/Lithography/Coaters |Lithography/Coaters]] page for coating polymers | See the [[Specific Process Knowledge/Lithography/Coaters |Lithography/Coaters]] page for coating polymers | ||