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===Equipment performance and process related parameters Dektak XTA_new===
===Equipment performance and process related parameters Dektak XTA===


[[image:Dektak XTA new.JPG|275x275px|right|thumb|Dektak XTA_new: positioned in cleanroom B-1.]]
[[image:Dektak XTA new.JPG|275x275px|right|thumb|Dektak XTA: positioned in cleanroom F-2.]]


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==Dektak 8 stylus profiler==
==Dektak 8 stylus profiler==
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