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Specific Process Knowledge/Etch/Wet III-V Etches: Difference between revisions

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[[Category: Etch (Wet) bath|III-V]]
[[Category: Etch (Wet) bath|III-V]]


This is a collection of III-V wet-etches; the rates should be tested before use. Make sure you have the proper education in mixing of chemicals before use.
This is a collection of III-V wet-etches; the rates should be tested before use. Make sure you have the proper education in mixing of chemicals before use. Wet etching of III-V materials is primarily to be done in 'Fume hood 07: III-V acids/bases'. Contact information, risk assessment and manual regarding this fume hood can be found in LabManager:


It is utterly important that your dispose of chemicals/etches according to the DTU Danchip regulations; more information is found in the III-V cleanroom.
<br>[http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=374 Fume hood 07 Info page in LabManager]
 
It is very important that you dispose off chemicals and process waste according to DTU Danchip regulations and risk assessments for your work.


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