Specific Process Knowledge/Lithography/UVExposure: Difference between revisions
| Line 430: | Line 430: | ||
* 100 mm wafer | * 100 mm wafer | ||
* 50 mm wafer | * 50 mm wafer | ||
* pieces down to 5x5 | * pieces down to 5x5 mm<sup>2</sup> | ||
|- | |- | ||
| style="background:LightGrey; color:black"|Allowed materials | | style="background:LightGrey; color:black"|Allowed materials | ||