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| Line 12: |
Line 12: |
| *'''4'''. The masking material is dissolved, thus lifting part of the deposited material. | | *'''4'''. The masking material is dissolved, thus lifting part of the deposited material. |
| *'''5'''. The remaining material forms the desired pattern on the substrate. | | *'''5'''. The remaining material forms the desired pattern on the substrate. |
|
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| {| border="2" cellspacing="0" cellpadding="2"
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|
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| !colspan="2" border="none" style="background:silver; color:black;" align="center"|Equipment
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| |style="background:WhiteSmoke; color:black" align="center"|<b>[[Specific Process Knowledge/Lithography/LiftOff#Lift-off |Lift-off]]</b>
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| |-
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| !style="background:silver; color:black;" align="center"|Purpose
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| |style="background:LightGrey; color:black"|
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| |style="background:WhiteSmoke; color:black"|
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| * AZ 5214E lift-off
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| * AZ nLOF lift-off
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| |-
| |
| !style="background:silver; color:black;" align="center"|Bath chemical
| |
| |style="background:LightGrey; color:black"|
| |
| |style="background:WhiteSmoke; color:black" align="center"|
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| NMP (Remover 1165) / Rinse in IPA
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| |-
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| !style="background:silver; color:black" align="center" valign="center" rowspan="2"|Process parameters
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| |style="background:LightGrey; color:black"|Process temperature
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| |style="background:WhiteSmoke; color:black" align="center"|
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| Heating of the bath is possible.
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|
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| The heating has been limited to 60°C
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| |-
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| |style="background:LightGrey; color:black"|Ultrasonic agitation
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| |style="background:WhiteSmoke; color:black" align="center"|
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| Continuous or pulsed
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|
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| The power may be varied
| |
| |-
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| !style="background:silver; color:black" align="center" valign="center" rowspan="3"|Substrates
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| |style="background:LightGrey; color:black"|Substrate size
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| |style="background:WhiteSmoke; color:black"|
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| * 100 mm wafers
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| * 150 mm wafers
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| |-
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| | style="background:LightGrey; color:black"|Allowed materials
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| |style="background:WhiteSmoke; color:black" align="center"|
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| Silicon or glass wafers
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|
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| Film or patterning of all but Type IV (Pb, Te)
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| |-
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| |style="background:LightGrey; color:black"|Batch
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| |style="background:WhiteSmoke; color:black" align="center"|
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| 1 - 25
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| |-
| |
| |}
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|
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|
| <br clear="all" /> | | <br clear="all" /> |
