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Specific Process Knowledge/Etch/KOH Etch: Difference between revisions

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Mbec (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
194 edits
Mbec (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
194 edits
Line 70: Line 70:
{| border="3" cellspacing="1" cellpadding="2" align="center" style="width:500px"
{| border="3" cellspacing="1" cellpadding="2" align="center" style="width:500px"
!QC limits
!QC limits
!KOH1
!Si Etch 01
!KOH 2&3
!Si Etch 02
|-
|-
|Etch rate in Si(100)
|Etch rate in Si(100)
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