Specific Process Knowledge/Thin film deposition/Physimeca: Difference between revisions
Appearance
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|style="background:LightGrey; color:black"|Film thickness||style="background:WhiteSmoke; color:black"| | |style="background:LightGrey; color:black"|Film thickness||style="background:WhiteSmoke; color:black"| | ||
*10 Å - 5000 Å* | *10 Å - 5000 Å* | ||
*Throw distance 46 cm | |||
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|style="background:LightGrey; color:black"|Available metals and deposition rates (Å/s) | |style="background:LightGrey; color:black"|Available metals and deposition rates (Å/s) | ||