Specific Process Knowledge/Thermal Process/Jipelec RTP: Difference between revisions
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*0-1000 <sup>o</sup>C | *0-1000 <sup>o</sup>C | ||
*III-V materials only to 450 <sup>o</sup>C | |||
*Temperature ramp up to 300 <sup>o</sup>C/min | *Temperature ramp up to 300 <sup>o</sup>C/min | ||
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|style="background:LightGrey; color:black"|Process pressure | |style="background:LightGrey; color:black"|Process pressure | ||