Specific Process Knowledge/Lithography/Coaters/Spin Coater: RCD8 processing: Difference between revisions
| Line 42: | Line 42: | ||
**0.3 ml/s @ 0.1 bar | **0.3 ml/s @ 0.1 bar | ||
**0.65 ml/s @ 0.2 bar | **0.65 ml/s @ 0.2 bar | ||
*'''Pink (0.024"):''' | |||
**?? ml/s @ 0.1 bar | |||
*'''Grey (0.047"):''' | *'''Grey (0.047"):''' | ||
**~2.5 ml/s @ 0.1 bar | **~2.5 ml/s @ 0.1 bar | ||