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Specific Process Knowledge/Lithography/Coaters/Spin Coater: RCD8 processing: Difference between revisions

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DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab307-labadviser-users-34891
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Taran (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab307-labadviser-users-34891
3,528 edits
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=Recipes=
=Recipes=
Auxiliary recipes, and template recipes. For each case a list of the steps/parameters in the respective recipe.


==General==
==Auxiliary recipes==
*'''1 DCH Centering test'''
*'''1 DCH Centering test'''
5s @ 100rpm; 5s @ 250rpm; 5s @ 500rpm.
5s @ 100rpm; 5s @ 250rpm; 5s @ 500rpm.
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0.2s dispense at cup (arm position 0mm).
0.2s dispense at cup (arm position 0mm).


==Manual dispense templates==
*'''1 TMPLT man disp'''
Spin-off; deceleration.
*'''1 TMPLT man disp spread'''
Spread step; spin-off; deceleration.
*'''1 TMPLT man disp Gyrset'''
Gyrset down; spin-off; deceleration; Gyrset up.
*'''1 TMPLT man disp Gyrset sprd'''
Gyrset down; spread step; spin-off; deceleration; Gyrset up.
==Automatic dispense templates==
*'''1 TMPLT aut disp SU8'''
Dispense; SU-8 string breaking; spread step; spin-off; deceleration.
*'''1 TMPLT aut disp SU8 Gyrset'''
Dispense; SU-8 string breaking; Gyrset down; spread step; spin-off; deceleration; Gyrset up.
*'''1 TMPLT aut disp'''
Dispense; spin-off; deceleration.
*'''1 TMPLT aut disp spread'''
Dispense; spread step; spin-off; deceleration.
*'''1 TMPLT aut disp Gyrset'''
Dispense; Gyrset down; spin-off; deceleration; Gyrset up.
*'''1 TMPLT aut disp Gyrset sprd'''
Dispense; Gyrset down; spread step; spin-off; deceleration; Gyrset up.


=Processing results=
=Processing results=
Retrieved from "https://labadviser.nanolab.dtu.dk//index.php?title=Specific_Process_Knowledge/Lithography/Coaters/Spin_Coater:_RCD8_processing"