Specific Process Knowledge/Thin film deposition/Sputter coater: Difference between revisions
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= The Sputter coater 03 (Cressington | = The Sputter coater 03 (Cressington) = | ||
[[image:Cressington_LA_1.jpg|300x300px|right|thumb|Sputter coater 03 (Cressington) located in the 346 basement, room 907]] | [[image:Cressington_LA_1.jpg|300x300px|right|thumb|Sputter coater 03 (Cressington) located in the 346 basement, room 907]] | ||
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One of the most effective ways to counter problems with charging on non-conducting samples during SEM investigations is to apply a conducting coating to the surface. The sputter coater allows you to coat small samples with a thin gold layer. When securely grounded, i.e. connected electrically with a sample holder using aluminium tape or clamps, the gold layer will effectively eliminate all charging problems in the SEM. | One of the most effective ways to counter problems with charging on non-conducting samples during SEM investigations is to apply a conducting coating to the surface. The sputter coater allows you to coat small samples with a thin gold layer. When securely grounded, i.e. connected electrically with a sample holder using aluminium tape or clamps, the gold layer will effectively eliminate all charging problems in the SEM. | ||
The sputter coater consists of a sputter chamber with a gold target and a stage. The stage consist of four smaller stages. These small stages can rotate individually in a planetary motion, when the entire stage rotates at the same time. The rotation speed | The sputter coater consists of a sputter chamber with a gold target and a stage. The stage consist of four smaller stages. These small stages can rotate individually in a planetary motion, when the entire stage rotates at the same time. The rotation speed can be controlled. Small samples can be mounted on a SEM pinstub holder (only use the smallest pinstubs) with carbon pads and then placed on one of the small stages. The maximum sample size is a 4 inch wafer. If your sample is larger than one of the four small stages, or if the sample is not fastened on a pinstub, the stage rotation should not be activated. | ||
The machine is controlled by a control panel. The sputter process will be done automatically, but the sputter time can be adjusted. | The machine is controlled by a control panel. The sputter process will be done automatically, but the sputter time can be adjusted. | ||
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The Balzer sputter coater is located in the 346 basement, room 907 (next to the SEM Supra 1) . | The Balzer sputter coater is located in the 346 basement, room 907 (next to the SEM Supra 1) . | ||
'''The user manual and contact information can be found in LabManager:''' | '''The user manual and contact information can be found in LabManager:''' | ||
[http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=303 Sputter coater 03] | [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=303 Sputter coater 03] | ||
==Process knowledge== | ==Process knowledge== | ||
*[[Specific_Process_Knowledge/Thin_film_deposition/Deposition_of_Gold|Deposition of gold]] | *[[Specific_Process_Knowledge/Thin_film_deposition/Deposition_of_Gold|Deposition of gold]] | ||
==Overview of the performance of the Sputter coater 03 (Cressington) and some process related parameters== | ==Overview of the performance of the Sputter coater 03 (Cressington) and some process related parameters== | ||