Specific Process Knowledge/Lithography/UVExposure: Difference between revisions
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*broadband (i-, g-, h-line) | *broadband (i-, g-, h-line) | ||
*365 nm (i-line) | *365 nm (i-line) | ||
*"UV300" (280-350 nm) | |||
*DUV (240 nm) <sup>1)</sup> | *DUV (240 nm) <sup>1)</sup> | ||
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