Specific Process Knowledge/Lithography/UVExposure: Difference between revisions
Appearance
| Line 25: | Line 25: | ||
*UV exposure | *UV exposure | ||
*(DUV exposure) | *(DUV exposure) | ||
*Bond alignment | |||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
*Top Side Alignment | *Top Side Alignment | ||