Specific Process Knowledge/Etch/Etching of Silicon Oxide: Difference between revisions
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*Quartz/fused silica | *Quartz/fused silica | ||
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*[http://labmanager.dtu.dk/function.php?module=XcMachineaction&view=edit&MachID=155 Please take a look in the cross contamination sheet in LabManager for details] | |||
*GaAs, GaN, InP, with epitaxial layers | *GaAs, GaN, InP, with epitaxial layers | ||
*Aluminum | *Aluminum | ||