Specific Process Knowledge/Etch/Etching of Silicon Oxide: Difference between revisions
| Line 176: | Line 176: | ||
*Quartz/fused silica | *Quartz/fused silica | ||
| | | | ||
*[http://labmanager.dtu.dk/function.php?module=XcMachineaction&view=edit&MachID=266 Please take a look in the cross contamination sheet in LabManager for details] | |||
*Silicon | *Silicon | ||
*Silicon oxides | *Silicon oxides | ||