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Specific Process Knowledge/Etch/DRIE-Pegasus/processA: Difference between revisions

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Jmli (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
4,579 edits
Jmli (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
4,579 edits
Line 432: Line 432:
| 2800      <!-- coil power -->
| 2800      <!-- coil power -->
| 140(1.5s) 45      <!-- platen power -->
| 140(1.5s) 45      <!-- platen power -->
| [[Specific Process Knowledge/Etch/DRIE-Pegasus/ProcessA/PrA-2 | 4]]      <!-- link processes -->
| [[Specific Process Knowledge/Etch/DRIE-Pegasus/processA/PrA-2 | 4]]      <!-- link processes -->
| Lower C<sub>4</sub>F<sub>8</sub> flow in dep cycle <!-- keywords -->
| Lower C<sub>4</sub>F<sub>8</sub> flow in dep cycle <!-- keywords -->
|-
|-
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