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Specific Process Knowledge/Etch/DRIE-Pegasus/processA: Difference between revisions

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Jmli (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
4,579 edits
Jmli (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
4,579 edits
Line 375: Line 375:
! colspan="4" | Deposition step
! colspan="4" | Deposition step
! colspan="6" | Etch step
! colspan="6" | Etch step
! colspan="3" | Comments
! colspan="2" | Comments
|-
|-
! Time
! Time
Line 402: Line 402:
| 2800      <!-- coil power -->
| 2800      <!-- coil power -->
| 140(1.5s) 45      <!-- platen power -->
| 140(1.5s) 45      <!-- platen power -->
| rowspan="2" |[[Specific Process Knowledge/Etch/DRIE-Pegasus/showerheadchange/ProcessA | 1]]      <!-- link processes -->
|[[Specific Process Knowledge/Etch/DRIE-Pegasus/showerheadchange/ProcessA | 4]]      <!-- link processes -->
| rowspan="2" | Step 2 original recipe  <!-- keywords -->
| Step 2 original recipe  <!-- keywords -->
|-
|-
! PrA-1 <!-- step -->
! PrA-1 <!-- step -->
Line 417: Line 417:
| 2800      <!-- coil power -->
| 2800      <!-- coil power -->
| 140(1.5s) 45      <!-- platen power -->
| 140(1.5s) 45      <!-- platen power -->
| rowspan="2" |[[Specific Process Knowledge/Etch/DRIE-Pegasus/showerheadchange/ProcessA | 1]]      <!-- link processes -->
|[[Specific Process Knowledge/Etch/DRIE-Pegasus/showerheadchange/ProcessA | 4]]      <!-- link processes -->
| rowspan="2" | Shorter dep cycle  <!-- keywords -->
| Shorter dep cycle  <!-- keywords -->
|-
|-
! PrA-2 <!-- step -->
! PrA-2 <!-- step -->
Line 432: Line 432:
| 2800      <!-- coil power -->
| 2800      <!-- coil power -->
| 140(1.5s) 45      <!-- platen power -->
| 140(1.5s) 45      <!-- platen power -->
| rowspan="2" |[[Specific Process Knowledge/Etch/DRIE-Pegasus/showerheadchange/ProcessA | 1]]      <!-- link processes -->
| [[Specific Process Knowledge/Etch/DRIE-Pegasus/showerheadchange/ProcessA | 4]]      <!-- link processes -->
| rowspan="2" | Lower C<sub>4</sub>F<sub>8</sub> flow in dep cycle <!-- keywords -->
| Lower C<sub>4</sub>F<sub>8</sub> flow in dep cycle <!-- keywords -->
|-
|-


|}
|}
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