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Specific Process Knowledge/Lithography/Development: Difference between revisions

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DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab307-labadviser-users-34891
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Taran (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab307-labadviser-users-34891
3,528 edits
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'''Process recipes'''
'''Process recipes'''
*SP 120s: Single puddle, 120s. Rinse and dry.
*SP 30s: Single puddle, 30s. Rinse and dry.
*SP 60s: Single puddle, 60s. Rinse and dry.
*SP 60s: Single puddle, 60s. Rinse and dry.
*SP 60s agi: Single puddle, 60s. 15 cycles per minute agitation during development. Rinse and dry.
 
*SP 60s prw: Single puddle, 60s. Pre-wetting step during developer dispense. Rinse and dry.
'''Utility recipes'''
'''Utility recipes'''
*UTIL-DR: Dome rinse.
*UTIL-DR: Dome rinse.
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