Specific Process Knowledge/Lithography/Coaters/Spin Coater: RCD8 processing: Difference between revisions
| Line 45: | Line 45: | ||
**~2.5 ml/s @ 0.1 bar | **~2.5 ml/s @ 0.1 bar | ||
= | =Recipes= | ||
==General== | ==General== | ||
*'''1 DCH Centering test''' | *'''1 DCH Centering test''' | ||
| Line 56: | Line 57: | ||
0.2s dispense at cup (arm position 0mm). | 0.2s dispense at cup (arm position 0mm). | ||
== | |||
=Processing results= | |||
==SU-8 2075== | ==SU-8 2075== | ||