Specific Process Knowledge/Pattern Design: Difference between revisions
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====Alignment marks location==== | ====Alignment marks location==== | ||
For the [[Specific Process Knowledge/Lithography/UVExposure#KS Aligner|KS Aligner]] and [[Specific Process Knowledge/Lithography/UVExposure#Aligner-6inch|Aligner-6inch]] | For the [[Specific Process Knowledge/Lithography/UVExposure#KS Aligner|KS Aligner]], [[Specific Process Knowledge/Lithography/UVExposure#Aligner:_MA6_-_2|MA6-2]] and [[Specific Process Knowledge/Lithography/UVExposure#Aligner-6inch|Aligner-6inch]] | ||
*The mask's alignment marks for 4inch process: | *The mask's alignment marks for 4inch process: | ||
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**Both BSA and TSA must be located between -2,5 and +2,5 mm in vertical location from mask center and 60 mm in left and right in horizontal location. | **Both BSA and TSA must be located between -2,5 and +2,5 mm in vertical location from mask center and 60 mm in left and right in horizontal location. | ||
**Please notice that if you plan to use the automatic alignment option the alignment marks must be displaced from y=0 to y=+/- 1,6mm. | **Please notice that if you plan to use the automatic alignment option the alignment marks must be displaced from y=0 to y=+/- 1,6mm. | ||
=== How to order a mask=== | === How to order a mask=== | ||