Specific Process Knowledge/Pattern Design: Difference between revisions
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If you have a Mac or Linux computer look [[/CleWin#Working with a Mac or Linux computer |here]]. | If you have a Mac or Linux computer look [[/CleWin#Working with a Mac or Linux computer |here]]. | ||
=== Layout file format=== | |||
For E-beam lithography the layout file has to be saved as a GDS file that is uploaded to the equipment computer. | For E-beam lithography the layout file has to be saved as a GDS file that is uploaded to the equipment computer. | ||