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Specific Process Knowledge/Etch/ICP Metal Etcher: Difference between revisions

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Bghe (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, Bureaucrats, Administrators
7,319 edits
Bghe (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, Bureaucrats, Administrators
7,319 edits
Line 65: Line 65:
|-
|-
| CH<sub>4</sub>: not working
| CH<sub>4</sub>: not working
| BCl<sub>3</sub>: 0-100 sccm
| BCl<sub>3</sub>: 0-90 sccm
|-
|-
| Cl<sub>2</sub>: 0-100 sccm
| Cl<sub>2</sub>: 0-100 sccm
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