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Specific Process Knowledge/Thermal Process/Dope with Phosphorus: Difference between revisions

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Kabi (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
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====2. Process parameters====
====2. Process parameters====
'''Substrate:''' p-type Si(100,)
'''Resistivity:''' 1-20 Ωcm
The total thermal budget for the wafers:
The total thermal budget for the wafers:


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