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Specific Process Knowledge/Thermal Process/Dope with Phosphorus: Difference between revisions

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Kabi (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
1,142 edits
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==Doping profile after Phosphorus Predep process==
==Doping profile results after phosphorous predeposition process==
"Result from GreenBelt, @Danchip,Jan 2015"


====Process parameters====
====1. Process parameters====


'''Recipe:'''  POCL900
'''Recipe:'''  POCL900
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====Process parameters====
====2. Process parameters====
The total thermal budget for the wafers:
The total thermal budget for the wafers:


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