Specific Process Knowledge/Thermal Process/Dope with Phosphorus: Difference between revisions
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==Doping profile after Phosphorus Predep process== | ==Doping profile after Phosphorus Predep process== | ||
" Result from GreenBelt, @Danchip,Jan 2015" | "Result from GreenBelt, @Danchip,Jan 2015" | ||
====Process parameters==== | ====Process parameters==== | ||
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[[image:Phosphorus_doping2015.jpg|600x600px|left|thumb|SIMS Measurement After Predeposition, before and after oxidation respectively]] | [[image:Phosphorus_doping2015.jpg|600x600px|left|thumb|SIMS Measurement After Predeposition, before and after oxidation respectively]] | ||
"Result from GreenBelt, @Danchip,Jan 2015" | |||
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====Process parameters==== | ====Process parameters==== | ||
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[[image:Phosphorous_doping_profile.jpg|600x600px|left|thumb|SIMS Measurement after Phosphorous Predeposition and several oxidations and annealings]] | [[image:Phosphorous_doping_profile.jpg|600x600px|left|thumb|SIMS Measurement after Phosphorous Predeposition and several oxidations and annealings]] | ||
''Result from Trine Holm Christensen, @Space, Feb. 2015'' | |||
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