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Specific Process Knowledge/Thermal Process/Dope with Phosphorus: Difference between revisions

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[[image:Phosphorus_doping2015.jpg|600x600px|left|thumb|SIMS Measurement after Phosphorous Predeposition and several oxidations and annealings]]
[[image:Phosphorous_doping_profile.jpg|600x600px|left|thumb|SIMS Measurement after Phosphorous Predeposition and several oxidations and annealings]]


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====Process parameters====
POCL1000 for 15 min, no anneal
WET1050 for 30 min in Furnace(A3)
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