Specific Process Knowledge/Thermal Process/A3 Phosphor Drive-in furnace: Difference between revisions
New page: ==A3 Furnace Phosphorus drive-in== thumb|300x300px|A1 Boron drive in furnace: positioned in cleanroom 2 A3 Furnace phosphorus drive-in is a Tempress horizontal furnace fo... |
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==A3 Furnace Phosphorus drive-in== | ==A3 Furnace Phosphorus drive-in== | ||
[[Image: | [[Image:image.JPG|thumb|300x300px|A3 phosphorus drive-in furnace: positioned in cleanroom 2]] | ||
A3 Furnace phosphorus drive-in is a Tempress horizontal furnace for oxidation of silicon wafers, annealing and for drive-in of phospher after a pre-deposition of phospher in the A4 Furnace phosporus pre-dep. It can also be used for drive in of phospher which has been ion implanted. | A3 Furnace phosphorus drive-in is a Tempress horizontal furnace for oxidation of silicon wafers, annealing and for drive-in of phospher after a pre-deposition of phospher in the A4 Furnace phosporus pre-dep. It can also be used for drive in of phospher which has been ion implanted. | ||
