Specific Process Knowledge/Thermal Process/Furnace: Multipurpose annealing: Difference between revisions
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*N<sub>2</sub>: 20 slm | *N<sub>2</sub>: 20 slm | ||
*O<sub>2</sub>: 10 slm | *O<sub>2</sub>: 10 slm | ||
*H<sub>2</sub>: 5 slm(max 2 slm for vacuum processes) | *H<sub>2</sub>: 5 slm (max 2 slm for vacuum processes) | ||
*N<sub>2</sub>-H<sub>2</sub> mix: 10 slm | *N<sub>2</sub>-H<sub>2</sub> mix: 10 slm | ||
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