Specific Process Knowledge/Thermal Process/Furnace: Multipurpose annealing: Difference between revisions
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==The ATV Furnace== | ==The ATV Furnace== | ||
[[Image:ATV_ovn.jpg|thumb| | [[Image:ATV_ovn.jpg|thumb|365x365px|Multipurpose annealing furnace. Positioned in cleanroom B-1]] | ||
[[Image:ATV_ovn_boat.jpg|thumb| | [[Image:ATV_ovn_boat.jpg|thumb|335x335px|Boat with wafer for the multipurpose annealing furnace.]] | ||
The Multipurpose annealing furnace it made by the company ATV Technologie, and it was installed in the cleanroom in 2014. | The Multipurpose annealing furnace it made by the company ATV Technologie, and it was installed in the cleanroom in 2014. | ||
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*Resist pyrolysis: Dedicated for resist pyrolysis. | *Resist pyrolysis: Dedicated for resist pyrolysis. | ||
Please note that all new materials have to be approved by the Thin Film group before they are allowed in the furnace. | Please note that all new materials have to be approved by the Thin Film group (thinfilm@danchip.dtu.dk) before they are allowed in the furnace. | ||
The furnace tube is heated by use on 12 long heaters situated along the furnace tube and two flat heaters situated in the ends of the furnace tube. The this way the temperature will be very uniform everywhere in the furnace tube. The heating can be done very fast, up to 30 <sup>o</sup>C/min. For atmospheric pressure processes the maximum temperature is 1100 <sup>o</sup>C, and for vacuum processes the maximum temperature is 1050 <sup>o</sup>C. Cooling is done (rather slowly) by use of cooling fans. | The furnace tube is heated by use on 12 long heaters situated along the furnace tube and two flat heaters situated in the ends of the furnace tube. The this way the temperature will be very uniform everywhere in the furnace tube. The heating can be done very fast, up to 30 <sup>o</sup>C/min. For atmospheric pressure processes the maximum temperature is 1100 <sup>o</sup>C, and for vacuum processes the maximum temperature is 1050 <sup>o</sup>C. Cooling is done (rather slowly) by use of cooling fans. | ||