Specific Process Knowledge/Thermal Process/Furnace: Multipurpose annealing: Difference between revisions
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==The ATV Furnace== | ==The ATV Furnace== | ||
[[Image: | [[Image:ATV_ovn.jpg|thumb|350x350px|Multipurpose annealing furnace. Positioned in cleanroom B-1]] | ||
[[Image:ATV_ovn_boat.jpg|thumb|350x350px|Boat with wafer for the multipurpose annealing furnace.]] | |||
The purpose of the ATV Furnace is to... | The purpose of the ATV Furnace is to... | ||