Specific Process Knowledge/Characterization/AFM: Atomic Force Microscopy/Workspaces: Difference between revisions
| Line 20: | Line 20: | ||
|Roughness measurement can be done in both Contact, Tapping and ScanAsyst mode. We recommend '''ScanAsyst mode''' because of less chance of (non-uniform) deformation of the sample and less tip wear - and because of ease of use. | |Roughness measurement can be done in both Contact, Tapping and ScanAsyst mode. We recommend '''ScanAsyst mode''' because of less chance of (non-uniform) deformation of the sample and less tip wear - and because of ease of use. | ||
|For Topographic measurements with no steep/abrupt steps we also recommend '''ScanAsyst mode''' due to less chance of (non-uniform) deformation of the sample and less tip wear - and because of ease of use. | |For Topographic measurements with no steep/abrupt steps we also recommend '''ScanAsyst mode''' due to less chance of (non-uniform) deformation of the sample and less tip wear - and because of ease of use. | ||
|For Steep/abrupt steps but no high aspect ratio structures we still recommend '''ScanAsyst mode''' due to ease of use and lower | |For Steep/abrupt steps but no high aspect ratio structures we still recommend '''ScanAsyst mode''' due to ease of use and lower tip wear. | ||
|For High aspect ratio measurements we recommend Tapping mode. There is not yet a ScanAsyst probe developed for high aspect ratio. Therefore we recommend '''Tapping mode'''. | |For High aspect ratio measurements we recommend Tapping mode. There is not yet a ScanAsyst probe developed for high aspect ratio. Therefore we recommend '''Tapping mode'''. | ||
|- | |- | ||