Specific Process Knowledge/Lithography/UVExposure: Difference between revisions
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*[[Specific Process Knowledge/Lithography/UVExposure_Dose|Information on UV exposure dose]] | *[[Specific Process Knowledge/Lithography/UVExposure_Dose|Information on UV exposure dose]] | ||
=== Equipment performance and process related parameters === | |||
{| border="2" cellspacing="0" cellpadding="2" | |||
!style="background:silver; color:black;" align="center" width="60"|Purpose | |||
|style="background:LightGrey; color:black"| | |||
|style="background:WhiteSmoke; color:black" align="center" colspan="2"| | |||
Alignment and UV exposure | |||
|- | |||
!style="background:silver; color:black" align="left" valign="center" rowspan="5"|Performance | |||
|style="background:LightGrey; color:black"|Exposure mode | |||
|style="background:WhiteSmoke; color:black" align="center" colspan="2"| | |||
vacuum contact, hard contact, soft contact, proximity, flood exposure | |||
|- | |||
| style="background:LightGrey; color:black"|Exposure light/filters | |||
|style="background:WhiteSmoke; color:black" align="center" colspan="2"| | |||
*broadband (i-, g-, h-line) | |||
*365 nm (i-line) | |||
*303 nm | |||
|- | |||
|style="background:LightGrey; color:black"|Minimum structure size | |||
|style="background:WhiteSmoke; color:black" align="center" colspan="2"| | |||
down to 1.25µm | |||
|- | |||
|style="background:LightGrey; color:black"|Mask size | |||
|style="background:WhiteSmoke; color:black" align="center" colspan="2"| | |||
*5x5 inch | |||
*7x7 inch | |||
*special holder for 4 x 2" designs on 5x5 inch | |||
|- | |||
|style="background:LightGrey; color:black"|Alignment modes | |||
|style="background:WhiteSmoke; color:black" align="center" colspan="2"| | |||
*Top side (TSA) | |||
*Backside (BSA) | |||
|- | |||
!style="background:silver; color:black" align="center" valign="center" rowspan="3"|Substrates | |||
|style="background:LightGrey; color:black"|Substrate size | |||
|style="background:WhiteSmoke; color:black" align="center" colspan="2"| | |||
* small pieces 1x1cm | |||
* 50 mm wafers | |||
* 100 mm wafers | |||
* 150 mm wafers | |||
|- | |||
| style="background:LightGrey; color:black"|Allowed materials | |||
|style="background:WhiteSmoke; color:black" align="center" colspan="2"| | |||
All cleanroom materials except copper and steel | |||
Dedicated chuck for III-V materials | |||
|- | |||
|style="background:LightGrey; color:black"|Batch | |||
|style="background:WhiteSmoke; color:black" align="center" colspan="2"| | |||
1 | |||
|- | |||
|} | |||
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